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SWCNT × Polymer Platform -Advanced Functional Polymer Solutions for Semiconductor Applications

SWCNT × Polymer Platform -Advanced Functional Polymer Solutions for Semiconductor Applications

Engineered integration of Single-Walled Carbon Nanotubes (SWCNT) into high-performance polymers to create next-generation materials for semiconductor contamination control, chemical delivery systems, and advanced manufacturing environments.
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DETAIL

Technology Overview

SWCNT (Single-Walled Carbon Nanotubes) provide exceptional electrical conductivity, high aspect ratio reinforcement, and tunable network formation within polymer matrices.

By precisely controlling dispersion, loading ratio, and interfacial bonding, our platform transforms conventional high-purity polymers into functional engineered materials optimized for semiconductor processes.

This is not simply material blending — it is a structured engineering platform.

Functional Modules

 ESD Control Network

SWCNT forms a percolation-based conductive pathway inside polymer matrices, enabling:

  • Tunable surface resistivity

  • Controlled volume resistivity

  • Reduced static charge accumulation

  • Minimized particle attraction

Applicable to tubing, panels, filter components, and tool interface parts.

Ultra-Low Extractables Design

Semiconductor processes require extremely low background contamination.

Our material platform is engineered to support:

  • Reduced organic extractables

  • Lower molecular contamination

  • Controlled metal ion background

  • Cleanroom-compatible processing

Validated via:

  • TOF-MS

  • GC-MS

  • ICP-MS

  • Ion chromatography

Chemical & Thermal Stability

SWCNT-enhanced polymer systems maintain structural integrity under:

  • Strong acids

  • Solvents (IPA, specialty chemicals)

  • Elevated temperature conditions

  • Long-term exposure environments

Material selection is optimized per process chemistry.

Mechanical Reinforcement

The high aspect ratio of SWCNT provides microstructural reinforcement that may improve:

  • Tensile strength

  • Fatigue resistance

  • Dimensional stability

  • Reduced creep behavior

(Performance dependent on polymer system and loading.)

Polymer Platforms

Our SWCNT integration technology supports multiple high-performance polymer families:

PFA × SWCNT

For chemical delivery tubing and wetted parts requiring chemical resistance and ESD control.

PTFE × SWCNT

For filtration media and ultra-chemical-resistant surfaces.

PVDF × SWCNT

Balanced mechanical strength and chemical compatibility for process lines.

PES / PSU × SWCNT

Water-based and specialty filtration systems.

PEEK × SWCNT

High-temperature and high-mechanical-stress components.

PC (Polycarbonate) × SWCNT

For structural housings and transparent components requiring controlled static performance.

FKM / FFKM (select applications)

For sealing systems with functional resistivity requirements.

Semiconductor Applications

Chemical Delivery Systems

EMI/ESD controlled tubing and piping for acids, IPA, and specialty chemicals.

Liquid Filtration

Filter elements and membrane support structures with improved stability and reduced contamination risk.

Gas & AMC Control

Functional polymer components for molecular contamination management.

FOUP & Carrier Systems

Static-controlled internal components and housing materials.

Precision Equipment Components

Panels, enclosures, and structural parts requiring EMI/ESD mitigation.

Performance Framework

Typical evaluation parameters include:

  • Surface resistivity (Ω/sq)

  • Volume resistivity (Ω·cm)

  • Extractables profile (TOF/GC)

  • Metal ion contamination (ICP)

  • Particle shedding

  • Flow stability

  • Mechanical integrity

All materials are developed under qualification-ready protocols.

Engineering Integration Model

  1. Process Requirement Definition

  2. Polymer Selection

  3. SWCNT Functional Target Setting

  4. Prototype Development

  5. Performance & Contamination Validation

  6. Pilot Integration

  7. Spec Freeze & Production SupporT

Why SWCNT × Polymer Platform?

✓ Tunable conductivity without metallic fillers
✓ Lightweight conductive solution
✓ Low loading requirement
✓ Compatible with high-purity processes
✓ Modular integration capability
✓ Scalable production

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