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Intelligent CO₂ Capture Systems

Enabling Decarbonization Across Industrial & Semiconductor Applications

Advanced carbon dioxide capture technologies engineered to reduce greenhouse gas emissions, enhance process sustainability, and support carbon neutrality strategies.

Supercritical Fluid Technology (SFT), due to its excellent solvating capability and environmentally friendly characteristics, has demonstrated strong potential in environmental remediation and resource recovery. This paper discusses the fundamental properties of supercritical fluids, their applications in wastewater treatment, solid waste management, and clean production processes, and analyzes current technological challenges and future development trends. Research indicates that supercritical fluid technology offers significant advantages in effectively removing hazardous substances and reducing environmental pollution, and it is expected to play an important role in future sustainable development initiatives

Per- and polyfluoroalkyl substances (PFAS) are a class of fluorinated compounds widely used in semiconductor manufacturing due to their exceptional chemical stability, thermal resistance, and surface energy properties. However, residual or unintended PFAS contamination can significantly affect yield performance in advanced process nodes