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Supercritical CO₂ Filter Regeneration Technology -Advanced Filter Recovery & Ultra-Low Contamination Cleaning Platform

Supercritical CO₂ Filter Regeneration Technology -Advanced Filter Recovery & Ultra-Low Contamination Cleaning Platform

Utilizing supercritical CO₂ (SC-CO₂) to regenerate semiconductor-grade filter elements by removing organic residues, adsorbed contaminants, and trace impurities — while preserving membrane integrity and performance.
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DETAIL

Technology Principle

Supercritical CO₂ is achieved when CO₂ is above its critical temperature (31.1°C) and critical pressure (7.38 MPa).
In this state, CO₂ exhibits:

  • Gas-like diffusivity

  • Liquid-like solvating power

  • Extremely low surface tension

This unique combination enables deep penetration into filter pores and microstructures, dissolving and extracting:

  • Organic residues

  • Adsorbed molecular contaminants

  • Hydrocarbon fragments

  • Process-related byproducts

Without leaving secondary contamination.

SC-CO₂  FOR REGENERATION FILTER

Traditional regeneration methods (water flush / solvent clean / thermal bake) may:

  • Leave solvent residue

  • Cause membrane swelling

  • Damage pore structure

  • Increase extractables

  • Shorten filter life

SC-CO₂ regeneration offers:

✓ Deep pore penetration
✓ No drying marks
✓ No capillary stress damage
✓ Reduced chemical consumption
✓ Controlled extraction environment

Applicable Filter Types

  • PTFE membrane filters

  • PVDF filter elements

  • PES / PSU liquid filters

  • Polymer-based gas filters

  • AMC-related adsorption structures

  • Select specialty composite media

(Compatibility validation recommended prior to implementation)

Regeneration Mechanisms

1. Solvation Extraction

SC-CO₂ dissolves non-polar and semi-polar organic contaminants.

2. Pore Penetration

Low surface tension allows penetration into micro-scale pore networks.

3. Pressure Modulation Extraction

Controlled depressurization enhances contaminant release.

4. Optional Co-Solvent Mode

Small percentage of modifier (if required) increases polarity range.

 

Semiconductor Applications

▸ Liquid Chemical Filters

IPA / Acid process filters

▸ UPW System Filters

▸ Gas Line Pre-Filters

▸ FOUP Vent Filters

▸ Specialty Process Filtration Modules

 

Advantages

Environmental

  • Reduced solvent waste

  • Low VOC emission

  • CO₂ recyclable

Engineering

  • Non-destructive regeneration

  • Extended filter lifecycle

  • Lower total cost of ownership

  • Controlled extraction selectivity

Contamination Control

  • No water residue

  • No drying stains

  • No re-adsorption of dissolved contaminants

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