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Photocatalyst Vent / Waste Gas Treatment System- Advanced Oxidative Decomposition for Cleanroom & Process Exhaust Control

Photocatalyst Vent / Waste Gas Treatment System- Advanced Oxidative Decomposition for Cleanroom & Process Exhaust Control

Photocatalytic Gas Treatment Technology

Efficient Decomposition of VOCs, AMC, and Hazardous Process Gases

Engineered photocatalyst-based vent treatment systems designed to decompose volatile organic compounds (VOCs), airborne molecular contaminants (AMC), and trace process gases in semiconductor manufacturing environments.

Delivering cleaner exhaust, improved corrosion control, and enhanced environmental compliance.
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DETAIL

Technology Overview

Photocatalytic oxidation (PCO) utilizes a semiconductor catalyst (commonly TiO₂-based) activated by UV or specific wavelength light to generate reactive species such as:

  • Hydroxyl radicals (•OH)

  • Superoxide radicals (O₂•⁻)

These reactive species oxidize organic and certain inorganic gas contaminants into:

  • CO₂

  • H₂O

  • Low-impact byproducts

Without combustion and at significantly lower operating temperatures than thermal oxidizers.

Target Contaminants

The system is designed to treat:

▸ Volatile Organic Compounds (VOCs)

Solvent vapors, IPA residues, hydrocarbon fragments.

▸ Airborne Molecular Contaminants (AMC)

Organic acids, basic vapors, siloxanes, trace hydrocarbons.

▸ Acidic / Reactive Gases (Selective Compatibility)

Process-related exhaust streams requiring oxidative reduction.

▸ Odor & Trace Chemical Control

System Architecture

A typical photocatalyst vent treatment module includes:

  1. Pre-filtration stage (particle removal)

  2. Flow conditioning chamber

  3. Photocatalyst coated media module

  4. UV or LED activation system

  5. Post-treatment polishing filter (optional)

  6. Monitoring sensors (optional VOC / gas detection)

Available configurations:

  • Inline exhaust integration

  • Tool-mounted compact module

  • Centralized duct installation

  • Modular scalable units

Photocatalyst Media Platform

Our catalyst modules may include:

  • TiO₂-coated structured media

  • Honeycomb catalytic substrate

  • Porous ceramic catalyst carriers

  • Functional polymer-supported catalyst layers

Optional enhancements:

  • Metal-doped TiO₂ for improved efficiency

  • Visible-light activation versions

  • SWCNT-enhanced catalyst support (advanced configuration)

Performance Metrics

Typical validation includes:

  • VOC reduction efficiency (%)

  • Breakthrough curve analysis

  • Gas concentration before/after treatment

  • Pressure drop

  • Catalyst lifespan

  • UV intensity stability

  • Byproduct verification

 

Semiconductor Applications

▸ Wet Bench Exhaust Treatment

Reduces solvent vapor emissions.

▸ Chemical Delivery Vent Lines

Minimizes organic back-diffusion.

▸ FOUP / Mini-Environment Exhaust

Improves localized contamination control.

▸ Lithography Area AMC Control

Protects sensitive optics and resists.

▸ Tool-Specific Gas Treatment Modules

Engineering Advantages

✓ Lower operating temperature than thermal oxidation
✓ Reduced energy consumption
✓ Continuous catalytic operation
✓ Minimal chemical consumables
✓ Compact footprint
✓ Retrofit-ready design

Qualification & Implementation Flow

  1. Gas composition analysis

  2. Contaminant concentration profiling

  3. Catalyst compatibility validation

  4. Pilot installation

  5. Reduction efficiency verification

  6. Long-term performance monitoring

Environmental & Compliance Value

  • Supports VOC emission reduction targets

  • Enhances cleanroom air stability

  • Contributes to ESG initiatives

  • Reduces hazardous waste handling

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